六氟化钼主要用于钼的同位素分离 |
添加时间:2019/10/9 16:14:59 浏览次数: |
六氟化钼白色块状结晶。密度2.55lg/cm3(液态,17.5℃)。熔点17.5℃。沸点35℃。遇干空气、氯气、二氧化硫不起反应。对湿空气敏感,生成蓝色的氧化钼。将钼粉加入铂管中,通干燥氟,加热至60℃即可制得。主要用于钼的同位素分离。可在微电子工业中用作化学气相淀积硅化钼或钼,以制作低电阻、高熔点的互连线。 White bulk crystals of molybdenum hexafluoride. The density is 2.55lg/cm3 (liquid, 17.5 C). Melting point 17.5 C. Boiling point 35 C. It does not react with dry air, chlorine and sulfur dioxide. It is sensitive to wet air and produces blue molybdenum oxide. Molybdenum powder was added into platinum tube, and fluorine was dried, then heated to 60 C. It is mainly used for isotope separation of molybdenum. It can be used for chemical vapor deposition of molybdenum silicide or molybdenum in microelectronics industry to make interconnects with low resistance and high melting point. |
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